“Based on this momentum, we are planning to add 30% to our 2026 low NA EUV capacity of around 65 for 2027, and we are investigating to increase capacity with another 30% for 2028.”

Implies roughly 85 low-NA EUV systems of capacity in 2027; CFO Roger Dassen said on the same call that ASML is close to having all the orders it needs to fill that capacity.